苏州翊湃思电子科技有限公司-WIL-White Light Interference 3D

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Home > Products > Surveying > WIL-White Light Interference 3D

WIL-White Light Interference 3D

Series Type: Surveying

Product Features

● Measures a variety of parameters such as step height, depth, roughness, etc.

● Fast measurement time of less than 1 second.

● Membrane Separation Function

● Z-axis measurement accuracy of hundreds of nanometres

● PSI mode (nanometre-scale measurements)

● Experience with diverse industries and product portfolios

● Select the autofocus option

kerwin@szshinho.com Contact Us

Products

Technical Principles

What is interferometry?

Interferometry is a method of measuring light from the same source by splitting it into two beams so that they travel in different paths and then observing the interference phenomenon that occurs when the two beams meet again.

This is a non-contact optical surface measurement method for small areas with high accuracy.

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①Light from LED lighting ②It is separated after passing through a beam splitter (B/S) and illuminates the reference mirror and the object under test respectively.
③The rays of light reflecting from the two objects meet again and produce an interference phenomenon, which makes it possible to determine the exact height value of the object to be measured.

Technical Advantage

● Measures a variety of parameters such as step height, depth, roughness, etc.

● Fast measurement time of less than 1 second

● Membrane separation function

● Z-axis measurement accuracy of hundreds of nanometres

● PSIparadigm(nanometre-scale measurements)

● Experience with diverse industries and product portfolios

● Select the autofocus option

企业微信截图_17521361607066(1).jpg

Application Cases

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Selection Form

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		nXI-5				nXI-5T						nXI-5C
Module Dimension (H x W x D)	Ⅷ3	331 x 182 x 109				470 x 255 x 172						222 x 150 x 81
Weight (Basic module)	kg	< 6				< 15						< 5
Lens Magnification	-	10X	20X	50X	100X	2.5X	5X	10X	20X	50X	100X	10X	20X	50X	100X
Measurement Area (F.O.V.) *	Ⅷx Ⅷ	0.96 x 0.96	0.48 x 0.48	0.192 x 0.192	0.096 x 0.096	3.8 x 3.8	1.9 x 1.9	0.96 x 0.96	0.48 x 0.48	0.192 x 0.192	0.096 x 0.096	0.662 x 0.414	0.331 x 0.207	0.132 x 0.082	0.066 x 0.041
Working Distance *	Ⅷ	7.4	4.7	3.4	2	10.3	9.3	7.4	4.7	3.4	2	7.4	4.7	3.4	2
Pixel Resolution *	川	1	0.5	0.2	0.1	4	2	1	0.5	0.2	0.1	0.345	0.172	0.069	0.034
Numerical Aperture (N.A.)	-	0.3	0.4	0.55	0.7	0.075	0.13	0.3	0.4	0.55	0.7	0.3	0.4	0.55	0.7
Anti-Vibration Table	Ⅷ	-	-	-	-	-	-	-	-	-	-	-	-	-	-

	nXI-2			nXI-5SC			nXI-5ST
Type	-	S	M	L	-		-
Module Dimension (H x W x D)	Ⅷ3	382 x 280 x 104.5	429 x 370 x 134.5	444 x 465 x 144.5	363 X 360 X 440		434 x 460 x 444
Weight (Basic module)	kg	< 7	< 10	< 15	16		23
Lens Magnification	-	-	-	-	10X (DefauIt)	20X (0ption)	10X (DefauIt)	20X (DefauIt)	5X (0ption)	50X (0ption)
Measurement Area (F.O.V.) *	ⅧxⅧ	9 x 6	19 x 13	33 x 22	0.662 x 0.414	0.331 x 0.207	0.662 x 0.414	0.331 x 0.207	1.324 × 0.828	0.132×0.82
Working Distance *	Ⅷ	27	80	80	7.4	4.7	7.4	4.7	10.3	3.4
Pixel Resolution *	川	1.95	4.29	7.09	0.345	0.172	0.345	0.172	0.69	0.069
Numerical Aperture (N.A.)	-	0.09	0.0583	0.037	0.3	0.4	0.3	0.4	0.13	0.55
Anti-Vibration Table	Ⅷ	-	-	-	500 x 600 x 100
① All information provided is subject to change without notice.