Technical Principles
What is interferometry? Interferometry is a method of measuring light from the same source by splitting it into two beams so that they travel in different paths and then observing the interference phenomenon that occurs when the two beams meet again. This is a non-contact optical surface measurement method for small areas with high accuracy. |
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①Light from LED lighting ②It is separated after passing through a beam splitter (B/S) and illuminates the reference mirror and the object under test respectively. |
Technical Advantage
● Measures a variety of parameters such as step height, depth, roughness, etc. ● Fast measurement time of less than 1 second. ● Membrane Separation Function ● Z-axis measurement accuracy of hundreds of nanometres ● PSIparadigm(nanometre-scale measurements) ● Experience with diverse industries and product portfolios ● Select the autofocus option |
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Application Cases
Selection Form
| nXI-5 | nXI-5T | nXI-5C | |||||||||||||
| Module Dimension (H x W x D) | Ⅷ3 | 331 x 182 x 109 | 470 x 255 x 172 | 222 x 150 x 81 | |||||||||||
| Weight (Basic module) | kg | < 6 | < 15 | < 5 | |||||||||||
| Lens Magnification | - | 10X | 20X | 50X | 100X | 2.5X | 5X | 10X | 20X | 50X | 100X | 10X | 20X | 50X | 100X |
| Measurement Area (F.O.V.) * | Ⅷx Ⅷ | 0.96 x 0.96 | 0.48 x 0.48 | 0.192 x 0.192 | 0.096 x 0.096 | 3.8 x 3.8 | 1.9 x 1.9 | 0.96 x 0.96 | 0.48 x 0.48 | 0.192 x 0.192 | 0.096 x 0.096 | 0.662 x 0.414 | 0.331 x 0.207 | 0.132 x 0.082 | 0.066 x 0.041 |
| Working Distance * | Ⅷ | 7.4 | 4.7 | 3.4 | 2 | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2 | 7.4 | 4.7 | 3.4 | 2 |
| Pixel Resolution * | 川 | 1 | 0.5 | 0.2 | 0.1 | 4 | 2 | 1 | 0.5 | 0.2 | 0.1 | 0.345 | 0.172 | 0.069 | 0.034 |
| Numerical Aperture (N.A.) | - | 0.3 | 0.4 | 0.55 | 0.7 | 0.075 | 0.13 | 0.3 | 0.4 | 0.55 | 0.7 | 0.3 | 0.4 | 0.55 | 0.7 |
| Anti-Vibration Table | Ⅷ | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| nXI-2 | nXI-5SC | nXI-5ST | ||||||||
| Type | - | S | M | L | - | - | ||||
| Module Dimension (H x W x D) | Ⅷ3 | 382 x 280 x 104.5 | 429 x 370 x 134.5 | 444 x 465 x 144.5 | 363 X 360 X 440 | 434 x 460 x 444 | ||||
| Weight (Basic module) | kg | < 7 | < 10 | < 15 | 16 | 23 | ||||
| Lens Magnification | - | - | - | - | 10X (DefauIt) | 20X (0ption) | 10X (DefauIt) | 20X (DefauIt) | 5X (0ption) | 50X (0ption) |
| Measurement Area (F.O.V.) * | ⅧxⅧ | 9 x 6 | 19 x 13 | 33 x 22 | 0.662 x 0.414 | 0.331 x 0.207 | 0.662 x 0.414 | 0.331 x 0.207 | 1.324 × 0.828 | 0.132×0.82 |
| Working Distance * | Ⅷ | 27 | 80 | 80 | 7.4 | 4.7 | 7.4 | 4.7 | 10.3 | 3.4 |
| Pixel Resolution * | 川 | 1.95 | 4.29 | 7.09 | 0.345 | 0.172 | 0.345 | 0.172 | 0.69 | 0.069 |
| Numerical Aperture (N.A.) | - | 0.09 | 0.0583 | 0.037 | 0.3 | 0.4 | 0.3 | 0.4 | 0.13 | 0.55 |
| Anti-Vibration Table | Ⅷ | - | - | - | 500 x 600 x 100 | |||||
| ① All information provided is subject to change without notice. | ||||||||||